Commissariat a L'energie Atomique Et Aux Energies Alternatives

Centre National De La Recherche Scientifique

Cyril Cayron

Sylvain Maitrejean

Francis Maury

Etienne Quesnel

Laurent Bedel

Michel Jouve

A method for diffusing metal particles including a composite layer deposited on a substrate, with the composite layer further including at least one dielectric matrix, and where the diffusion of the metal particles towards the substrate is achieved by means of a plasma treatment.

Method for diffusing metal particles within a composite layer

The method comprises affixing a thin sheet of crystal () onto metal () of same type as the sheet but amorphous or of small grain size, deposited in trenches of a substrate () to form interconnect lines for example. Annealing progressively imposes the crystalline structure of the sheet onto the lines. When the crystal () is removed, highly conductive crystalline lines are obtained since the grains thereof have been greatly enlarged.

Method for creating a metal crystalline region, in particular in an integrated circuit

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Grenoble, France

Cyril Cayron