Csem Centre Suisse D'electronique Et De Microtechnique Sa

Cynthia Beuret

Philipp Niedermann

Sylvain Jeanneret

A process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope, consists in creating a 'positive' first mold by isotropically or anisotropically undercutting a silicon substrate. The resulting tip is precursor of the hard material (preferably diamond) tip to be obtained. The precursor has a small angle at the apex, for example in the order of 10.degree. to 20.degree., or less. The positive mold is then used to fabricate a 'negative' mold having an imprint whose shape is that of the tip precursor. The negative mold is filled with a layer of hard material and the tip is then uncovered. The hard material tip therefore also has a small angle at the apex, equal to that of the precursor. The resolution that can be achieved with the probe is therefore higher than that assured by prior art probes.

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Neuchatel, Switzerland

Cynthia Beuret