Cymer, Inc.

Other

Curtiss Lynn Mixon

Palash P Das

Xiaojiang Jason Pan

Donald G Larson

James K Howey

Celestino John Gaeta

Richard A Eis

Ralph Kenneth Nair, Ii

Jerry Rudy Gerent

Larry Shintaku

Anthony John deRuyter

James D Payne

A method and apparatus to equalize the voltage across each light bulb in a low-voltage lighting system, commonly found in the yards of private homes and businesses. The present invention consists of a power compensation element that is inserted in-line with each light bulb connected to the bus lines that distribute current from a power source, such as an electrical transformer, to the light bulbs. The function of the power compensation element is to compensate for the voltage drop along the bus lines due primarily to the electrical resistance of the bus lines. Therefore, a compensation rating of the power compensation element may depend upon its location along the bus lines and the electrical resistivity of the bus lines, as well as the internal electrical resistance of the light bulbs. The preferred embodiment is an electrical resistive power compensation element where the rating of the element is its resistance value. One alternate embodiment is an electrical transformer power compensation element where the rating is the transformer ratio of output-to-input voltage, while another alternate embodiment is a diode-based, voltage-limiting circuit power compensation element, typically with equal rating where the rating is the voltage-limiting reference level of the circuit.

Voltage equalization method and apparatus for low-voltage lighting systems

A chamber/optics support structure for a laser having a laser chamber with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels which in turn rests on two tracks on track supports mounted on the platform. A flexible clamp flexibly clamps the chamber in a horizontal position to align it with the resonance cavity optical elements and to substantially decouple vibration between the chamber vibration source to the optical elements in a frequency range of concern. The invention is especially useful for positioning the heavy laser chamber of a narrow band excimer laser and for decoupling vibrations resulting from its blower from the lasers line narrowing module and output coupler. In a preferred embodiment the plurality of wheels is three wheels, two of which rest in a V-groove track and one of which rests on a flat track. This preferred embodiment uses two flex-clamps each having an adjustment bolt and four symmetrically spaced silicon rubber vibration isolators. Precise horizontal alignment of the chamber is accomplished using the adjustment bolt which is then held in position with a lock nut and a clamping bolt. Silicon rubber dampers in the isolators decouple horizontal chamber vibrations from the optical elements.

Gas laser chamber/optics support structure

A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.

Stabilized laser platform and module interface

A laser control system with multiple CPU's having shared memory on a common bus to provide high performance, relatively lost-cost, laser control. In the system disclosed, a first CPU which handles most, if not all, communication to and from the laser control system and which may communicate with one or more additional CPU's through the shared memory, so as to be capable of providing the software and operating commands to one or more additional processors on the common bus. A second processor is provided to control the intensity and repetition rate of a gas laser responsive to the program and commands made available thereto through the shared memory by the first processor. In addition, the second processor may directly respond to specific controls provided thereto to allow operation of the laser directly in response to control signals provided thereto from the outside, rather than based on parameters provided thereto by the first processor. Additional processors may be provided on the common bus for other common, typically dedicated functions. The use of shared memory on a common bus for communication between processors allows automatic operation of a laser system through communication with only a single processor, simplifying system initialization and implementation of software updates. The controller is configured around a popular bus structure to make maximum use of commercially available board level subsystems to provide a highly versatile laser controller without requiring substantial and expensive special circuit board design and fabrication.

Gas discharge laser control systems using multiple CPU's with shared

An external control system for a laser system, used as an illumination source for a stepper system, is provided. The external control allows for a measuring of the energy actually distributed to a wafer and a correction of the energy dose distribution based upon this measurement. In this way, a more precise energy dose control is achieved. The external control communicates with the laser's own internal control system to provide serial inputs which allow for corrections to be made to the High Voltage setting based upon the aforementioned measurements, and coordinates with the laser's internal control system to initiate laser operation at the required intervals.

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Encinitas, CA, United States of America

Curtiss Lynn Mixon