Litmas, Inc.

Other

Veeco Instruments Inc.

Curtis Charles Camus

Russell F Jewett

Dennis John Hansen

James David Deakins

The presently disclosed technology provides a responsive ion beam source power supply system capable of handling fault events without relying on conventional protection circuitry (e.g., fuses and breakers) so that physical power supply hardware intervention by a user is minimized for typical fault conditions and the ion beam source power supply system may recover automatically after experiencing a fault condition. The presently disclosed technology further discloses an ion beam source power supply system capable of detecting and diagnosing fault states, autonomously implementing command decisions to preserve or protect the function of other ion source modules or sub-systems, and/or mitigating or recovering from the disruptive fault event and returning the ion beam source system to desired user settings.

Fault tolerant ion source power system

A variable frequency RF power delivery system is used with a control system that adjusts the output frequency of the RF power delivery system. Frequency adjustments are made so as to maintain the required input current and input voltage within the capabilities of the input current and input voltage source.

Methods and apparatus for RF power process operations with automatic input power control

RF power is delivered to a load in an RF power processor for carrying out process operations. The RF power delivery is performed using a variable frequency RF power amplifier and a control system. The control system maintains RF power delivery using control signals derived from reference RF signals used by the RF power amplifier and measurements of a characteristic of the RF power. The magnitude of the delivered RF power is controlled using measurements of the power input to the RF power amplifier.

Methods and apparatus for RF power delivery

Plasma processing is carried out in an apparatus having improved stability and reliability for plasma ignition. The improved plasma ignition characteristics result from a modified RF induction coil. One or more nonresonant sections have been added to the RF power induction coil. The nonresonant sections generate enhanced electric fields for igniting the plasma.

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Fort Collins, CO, United States of America

Curtis Charles Camus