Semitool, Inc.

Curtis A Weber

Kyle Moran Hanson

Daniel J Woodruff

Randy Harris

Steve L Eudy

Gregory J Wilson

Thomas Lee Ritzdorf

Daniel P Bexten

Timothy A Anderson

Tim McGlenn

Processing tools, components of tools, and methods of making and using such devices for electrochemical processing of microelectronic workpieces. One aspect of the invention is directed toward reaction vessels for electrochemical processing of microelectronic workpieces, processing stations including such reaction vessels, and methods for using these devices. For example, one embodiment of a reaction vessel includes an outer container having an outer wall, a first outlet configured to introduce a primary fluid flow into the outer container, and at least one second outlet configured to introduce a secondary fluid flow into the outer container separate from the primary fluid flow. The reaction vessel can also include at least one electrode, and it can also have a field shaping unit. The field shaping unit, for example, can be a dielectric assembly coupled to the second outlet to receive the secondary flow and configured to contain the secondary flow separate from the primary flow through at least a portion of the outer container. The field shaping unit can also have at least one electrode compartment through which the secondary flow can pass separately from the primary flow. The electrode is positioned in the electrode compartment.

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamberincludes a plurality of wallsdefining a plurality of electrode compartments, each electrode compartment having at least one electrodetherein, and a virtual electrode unitdefining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unitmay be exchanged for a second virtual electrode unit, without modification of any of the electrodes, to adapt the processing chamberfor treating a different workpiece.

Adaptable electrochemical processing chamber

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Columbia Falls, MT, United States of America

Curtis A Weber