Semilab Semiconductor Physics Laboratory Co., Ltd.

Csaba Buday

Jacek J Lagowski

Marshall D Wilson

Alexandre Savtchouk

Carlos Almeida

An example method of characterizing a semiconductor sample includes measuring an initial value, V, of a surface potential at a region of a surface of the semiconductor sample, biasing the semiconductor sample to have a target surface potential value (V) of 2V or less, and depositing a monitored amount of corona charge (&#x394;Q) on the region of the surface after adjusting the surface potential to the target value. The method also includes measuring a first value, V, of the surface potential at the region after depositing the corona charge, determining the first change of surface potential (&#x394;V=V&#x2212;V), and determining the first capacitance value C=&#x394;Q/&#x394;V, and characterizing the semiconductor sample based on V, V, &#x394;V, &#x394;Qand C.

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Balatonalmádi, Hungary

Csaba Buday