Lsi Logic Corporation

Hyundai Electronics America, Inc.

At&t Global Information Solutions Company

Symbios Logic Inc.

Crystal J Hass

Derryl D Allman

Matthew S Von Thun

James P Yakura

Richard K Cole

David W Daniel

Theodore C Moore

Patrick J Kelleher

The present invention provides a method for forming an electrostatic chuck. A chuck body is provided in which the chuck body includes an insulating layer. Metal is implanted into a surface of the chuck body, wherein a conductive layer of metal is formed within the insulating layer of the chuck body.

Method for forming an ion implanted electrostatic chuck

The present invention provides a method for manufacturing a semiconductor device on a substrate. The process involves denuding the substrate by heating to create a denuded zone within the substrate. A screen oxide layer is formed prior to implanting ions into the substrate. This oxide layer remains during the implantation step. The screen oxide layer is removed when forming gates for the semiconductor device.

Method for improved gate oxide integrity on bulk silicon

A method and structure for sensing data such as temperature with respect to objects such as silicon wafers undergoing fabrication or other processes involve the use of a monitor element of material and configuration similar to that of the objects being processed. A structure such as a closed loop or segment of a spiral may be formed on the surface of the monitor element, and acts as a secondary coil when brought into operative relation with a transformer structure which includes a primary coil, a current source and a sensing device. The sensing device senses variations in the electrical characteristics in the primary coil, caused by the presence of the monitor element, and can thereby determine the temperature or other desired data relating to the monitor element, which is substantially the same as comparable data for the objects being processed.

Method for manufacturing a monitor element

Structure and method for remotely measuring process data

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Colorado Springs, CO, United States of America

Crystal J Hass