Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl-Zeiss-Smt Ag (2 from 461 patents)
2 patents:
1. 7294814 - Microlithography projection objective including deformable mirror with adjusting elements and systems and methods using the same
2. 7112772 - Catadioptric projection objective with adaptive mirror and projection exposure method