Asml Netherlands B.v.

Teledyne Dalsa B.v.

Cristian Bogdan Craus

Amir Abdolvand

Richard Joseph Bruls

Sebastian Thomas Bauerschmidt

Dzmitry Labetski

Hendrikus Gijsbertus Schimmel

Kerim Nadir

Sander Baltussen

Jan Groenewold

Inge Peters

Chuangxin Zhao

Christian Felix Wählisch

Pär Mårten Lukas Broman

Anna Ezerskaia

Phani Kumar Domalapally

An optical component for a broadband radiation source device, the optical component configured for generating a broadband output upon receiving pump radiation and including: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling the HC-PCF, wherein the gas mixture includes a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas including or consisting of helium.

Hollow-core fiber based broadband radiation generator with extended fiber lifetime

A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

Hollow core fiber light source and a method for manufacturing a hollow core fiber

A radiation source for a lithographic apparatus, in particular a laser-produced plasma source includes a fan unit surrounding but not obstructing the collected radiation beam that is operated to generate a flow in a buffer gas away from the optical axis. The fan unit can include a plurality of flat or curved blades generally parallel to the optical axis and driven to rotate about the optical axis.

Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method

A moisture protection structure () used to protect a device () against moisture penetration. The device () has a first area (A) at a first side (S) for emitting or receiving radiation (RE;RR). The device () has a second side (S) opposite to the first side (S) attached to a supporting means (). A lateral side (LS) of the device () is defined between a first perimeter delimiting the first area (A) on the first side (S) and a second perimeter delimiting a second area (A) on the second side (S). The moisture protection structure () includes at least one moisture-resistant layer () deposited on the first area (A) and the lateral side (LS) of the device () and a moisture-resistant cover () arranged to cover the at least one moisture-resistant layer () at the first side (S). The moisture-resistant cover () and the at least one moisture-resistant layer () are transparent for the emitting or receiving radiation (RE;RR). The moisture protective structure () further includes a pressurizing member () attached to the supporting means (). The pressurizing member () includes an elastic deformable material () and it is arranged to exert a pressure on the moisture-resistant cover () towards the second side (S) of the device (). The pressure on the moisture-resistant cover () ensures that the first side (S) of the device () is sealed against moisture penetration.

Moisture protection structure for a device and a fabrication method thereof

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Helmond, Netherlands

Cristian Bogdan Craus