Entegris, Inc.

Craig Wallace Martland

J Karl Niermeyer

Dmitri Menn

Marc Brian Laverdiere

Hirokazu Kuwabara

John Paul Puglia

Ben Mai Pak Lee

Louis Barrows, Jr

Kalyan Madhavaram

Koichi Kurata

The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Purification system with manifold assembly and removable filter cassette

Growing community of inventors

Salem, NH, United States of America

Craig Wallace Martland