Svg Lithography Systems, Inc.

Craig S Dunning

Hoon-Yeng Yap

Joseph L Laganza

Teodorico A Cruz

Erik Magnussen

A cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.

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Chandler, AZ, United States of America

Craig S Dunning