Entegris, Inc.

Elan Pharma International Limited

Other

Applied Materials, Inc.

Mykrolis Corporation

Craig L Brodeur

Jieh-Hwa Shyu

J Karl Niermeyer

Robert F McLoughlin

Marc Brian Laverdiere

Christopher J Wargo

William Basser

Izrail Tsals

Oz Cabiri

Qunwei Wu

Mario Rozanowich

Joseph Gross

Harald Herchen

Gilad Lavi

David Daily

Vincent E Burkhart

Kevin A Durand

John E Pillion

Eran Shor

Eric McNamara

Haim Danon

Peter V Kimball

Robert Etheredge

Avi Azoulay

Jieh Hwa Shyu

Quinwei Wu

David Katz

Miki Sahar

Jacob Stern

Diana Davidson

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

Fluid flow measuring and proportional fluid flow control device

One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

System and method for flow monitoring and control

One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can be adjusted by application of fuzzy logic which involves quantizing input variables into the degree to which a small set of logical values is true. In one embodiment, variables related to flow rate and change in flow rate over time can be compared to membership functions to generate fuzzy inputs, based upon which fuzzy outputs can be generated.

A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.

Pleated construction for effecting gas transfer membrane

A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

Device and method for increasing mass transport at liquid-solid diffusion boundary layer

The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.

Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned above the electrolyte container, the head assembly being configured to support a substrate during an electrochemical plating process, and an anode assembly positioned in a lower portion of the electrolyte container. The anode assembly generally includes a copper member having a substantially planar upper surface, at least one groove formed into the substantially planar upper surface, each of the at least one grooves originating in a central portion of the substantially planar anode surface and terminating at a position proximate a perimeter of the substantially planar upper surface, and at least one fluid outlet positioned at a perimeter of the substantially planar upper anode surface.

Anode impedance control through electrolyte flow control

A system adapted to be disposed between a rigid or semi-rigid device and human skin for reliably attaching the device to the skin for an extended period of time. The system includes a skin-contacting surface for adhering to human skin, and an opposed surface for attachment to a rigid or semi-rigid device. The system is attached along its opposed surface to a portion of the total area of the adjacent surface of the device. When the device is subjected to external stress, the stress is transmitted through the area of attachment and distributed to the unattached area. This minimises stress on the skin and reduces the chance of detachment from the skin.

Drug delivery device having improved adhesion and attachment system for drug delivery device

A drug delivery device having a housing having an internal reservoir in communication with a drug delivery outlet via a fluid path. An expandable chamber disposed adjacent to the reservoir forces drug from the reservoir to the outlet when supplied with a gas. A flow regulating chamber, in communication with the fluid path, is capable of volumetric changes in response to temperature and/or pressure changes. An increase in the volume of the flow regulating chamber increases flow resistance to the outlet and thereby counteracts the corresponding increase in delivery rate resulting from the expansion of the expandable chamber due to the same volumetric changes in response to temperature and/or pressure. In a preferred embodiment, an electrical circuit has a current stabilizing element in electrical communication with an electrolytic cell which supplies the gas. A throttling device maintains a higher pressure in the device to reduce possible clogging of the fluid path. In a preferred embodiment, the drug delivery device is packaged to insulate the device from atmospheric pressure and humidity.

Drug delivery device

A stopper for use in preventing any volume of gas from escaping from a drug container when used in connection therewith. The stopper has a body having a perimeter for slidable engagement with the interior of a drug receptacle; an outer surface; and an inner surface facing the bottom of the drug receptacle, the inner surface shaped so as to trap any volume of gas located within the drug receptacle when the body is slidably engaged therein. The invention is further directed to a drug container having a hollow body for holding a liquid. The body has an open end and a closed end. The container also has a stopper slidably received in the hollow body, and a feature for entrapping any volume of gas within the container.

Growing community of inventors

Marlborough, MA, United States of America

Craig L Brodeur