California Institute of Technology

Craig E Ives

Seyed Ali Hajimiri

Aroutin Khachaturian

Seyed Mohammadreza Fatemi

Matan Gal

Armina Khakpour

Disclosed herein is a phased antenna array which is configured to provide a signal through multiple antennas. The phased antenna array may include a plurality of sub-arrays. Each sub-array may include a complete and functional optically synchronized integrated circuit including an integrated photo diode. Advantageously, integrating the photo diode into the integrated circuit may reduce the size of the sub-array and decrease the length the high frequency timing signal is passed.

Optically synchronized phased array

A method of fabricating a photonic device includes in part, forming a multitude of metal and dielectric layers over a semiconductor substrate to form a structure. The metal layers form a continuous metal trace that characterize an etch channel. At least one of the metal layers extends towards an exterior surface of the structure such that when the structure is exposed to a metal etch, the metal etch removes the metal from the exterior surface of the structure and flows through the etch channel to fully etch the metal layers. The metal etch leaves behind a dielectric structure characterizing a photonic device. The photonic device may be a suspended rib waveguide, a suspended channel waveguide, a grating coupler, an interlayer coupler, a photodetector, a phase modulator, an edge coupler, and the like. A photonics system may include one or more of such devices.

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Pasadena, CA, United States of America

Craig E Ives