Cree Gmbh

Craig Capell

Sei-Hyung Ryu

Anant Kumar Agarwal

John Williams Palmour

Qingchun Zhang

Daniel Jenner Lichtenwalner

Edward Robert Van Brunt

Alexander V Suvorov

Brett Hull

Charlotte Jonas

David Grider

Semiconductor devices include a semiconductor layer structure having a wide band-gap semiconductor drift region having a first conductivity type. A gate trench is provided in an upper portion of the semiconductor layer structure, the gate trench having first and second opposed sidewalls that extend in a first direction in the upper portion of the semiconductor layer structure. These devices further include a deep shielding pattern having a second conductivity type that is opposite the first conductivity type in the semiconductor layer structure underneath a bottom surface of the gate trench, and a deep shielding connection pattern that has the second conductivity type in the first sidewall of the gate trench. The devices include a semiconductor channel region that has the first conductivity type in the second sidewall of the gate trench.

Power semiconductor devices having gate trenches with implanted sidewalls and related methods

A negative bevel edge termination for a Silicon Carbide (SiC) semiconductor device is disclosed. In one embodiment, the negative bevel edge termination includes multiple steps that approximate a smooth negative bevel edge termination at a desired slope. More specifically, in one embodiment, the negative bevel edge termination includes at least five steps, at least ten steps, or at least 15 steps. The desired slope is, in one embodiment, less than or equal to fifteen degrees. In one embodiment, the negative bevel edge termination results in a blocking voltage for the semiconductor device of at least 10 kilovolts (kV) or at least 12 kV. The semiconductor device is preferably, but not necessarily, a thyristor such as a power thyristor, a Bipolar Junction Transistor (BJT), an Insulated Gate Bipolar Transistor (IGBT), a U-channel Metal-Oxide-Semiconductor Field Effect Transistor (UMOSFET), or a PIN diode.

SiC devices with high blocking voltage terminated by a negative bevel

A vertical power transistor is monolithically packaged on a semiconductor die with gate buffer circuitry. The gate buffer circuitry is adapted to deliver a biasing voltage to a gate contact of the vertical power transistor for switching the device between an ON state and an OFF state. By monolithically packaging the gate buffer circuitry together with the vertical power transistor, parasitic inductance between the gate buffer circuitry and the gate of the vertical power transistor is minimized, thereby decreasing the switching time of the vertical power transistor and reducing switching noise.

Vertical power transistor with built-in gate buffer

A silicon carbide device is fabricated by forming a plurality of a same type of silicon carbide devices on at least a portion of a silicon carbide wafer in a predefined pattern. The silicon carbide devices have corresponding first contacts on a first face of the silicon carbide wafer. The plurality of silicon carbide devices are electrically, tested to identify ones of the plurality of silicon carbide devices which pass an electrical test. The first contact of the identified ones of the silicon carbide devices are then selectively interconnected. Devices having a plurality of selectively connected silicon carbide devices of the same type are also provided.

Large area silicon carbide devices and manufacturing methods therefor

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Hillsborough, NC, United States of America

Craig Capell