U.S. Philips Corporation

Asml Netherlands B.v.

Cornelis D Van Dijk

Jan Van Eijk

Johannes M Van Kimmenade

Gerard Van Engelen

Joris A Nieuwendijk

Fransiscus Mathijs Jacobs

Frank B Sperling

Georgius B Sanders

Adrianus J Kaizer

Willem R De Wild

Johannes Brandsma

Henricus W Janssen

Adrianus Van Der Pal

Johannes M M Van Kimmenade

Dominicus J Franken

Jan Van Eljk

Adianus G Bouwer

A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device

Positioning device with a reference frame for a measuring system, and a

Positioning device with a vibration-free object table, and lithographic

A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation system (1, 13) is displaceable, and by a support member (35), over which the object table (21) is guided by means of an aerostatic foot (31). In an operational position, the unit (65) is coupled to a carrier (67) by means of coupling members (73), the carrier (67) being suspended from the mounting member (5) by means of suspension elements (79, 81, 83), so that the unit (65) is arranged between lower frame supports (25) of the frame (7) and a compact construction is obtained. The unit (65) can be rotated from the operational position to an end position, in which the unit (65) is entirely outside the frame (7) and is easily accessible for maintenance, by means of a rotation mechanism (87) and a swivel mechanism (89). The lithographic device can be used inter alia for irradiating semiconductor substrates, a semiconductor pattern provided on a mask (11) being imaged on a semiconductor substrate (19) provided on the object table (21) by means of the irradiation system (1, 13).

Lithographic device with a suspended object table

A sintering press for comprising a stack of foils is formed of a lower die, an upper die opposing the lower die and a furnance surrounding the dies. At least one of the two dies is supported at its end face remote from the other die by a spherical bearing surface so that this die can adjust itself by tilting so that the center lines of the two dies are no longer in line with each other. As a result, a uniform pressure distribution is obtained on the stack of foils.

Apparatus for compressing a stack of juxtaposed foils

An electroacoustic transducer comprises a diaphragm (1), a magnet system (4) and a voice coil (3) arranged on a voice-coil former (2) in an air gap (5) of the magnet system. The movement is transmitted between the voice-coil former and the diaphragm via a lever mechanism comprising n lever devices (6) arranged at an angle relative to each other (n.gtoreq.2). A lever device (6) comprises a lever arm (9) coupled to a fulcrum (11) at the location of a first position (10) on the lever arm, to the voice-coil former (2) at the location of a second position (13), and to the diaphragm (1) at the location of a third position (14). The lever mechanism multiplies the excursion of the voice-coil former by a factor greater than unity. This results in an electroacoustic transducer with a long stroke which provides large excursions of the diaphragm. The lever mechanism may also be employed in other types of transducer, such as piezo-ceramic transducers. A compliant element (25) formed as a zigzag bellows secured both to the outer circumference of the diaphragm and to the chassis (26) to permit the large excursion of the diaphragm, is constructed so as to reduce the acoustic contribution of the compliant element to the transducer output signal, which contribution forms a distortion component in the output signal.

Large-excursion electroacoustic transducer

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Boxtel, Netherlands

Cornelis D Van Dijk