Carl-zeiss-smt Ag

Cornelia Roesch

Hubert Holderer

Bernhard Gellrich

Alexander Kohl

Thomas Petasch

Klaus Guenther Beck

A arrangement serves for the adjustment of an optical element (), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element () is mounted in a mount () by means of a number of bearing feet () distributed over the circumference of the optical element () and is selectively deformable by actuators (). At least some of the bearing feet () are engaged by the actuators () in a region of the respective bearing foot () in such a way that the respective bearing foot () can be displaced in the direction of the optical axis ().

Adjustment arrangement of an optical element

An arrangement serves for the adjustment of an optical element (), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element () is mounted in a mount () by means of a number of bearing feet () distributed over the circumference of the optical element () and is selectively deformable by actuators (). At least some of the bearing feet () are engaged by the actuators () in a region of the respective bearing foot () in such a way that the respective bearing foot () can be displaced in the direction of the optical axis ().

Growing community of inventors

Oberkochen, Germany

Cornelia Roesch