Massachusetts Institute of Technology

Trustees of the Colorado School of Mines

Leland Stanford Junior University

Corinne E Packard

Vladimir Bulovic

Apoorva Murarka

LeeAnn Kim

Jennifer Jong-Hua Yu

Vanessa Wood

Gleb M Akselrod

Matt Musselman

Rachel Schoeppner

Suchismita Sarker

Apurva Mehta

Taylor M Wilkinson

A metallic glass coating material is composed of an alloy of Fe, B, and one of the metals Nb, Mo, Zr, or W. The ratios of Fe, B, and the metal are predetermined using machine learning predictions and high-throughput experiments. In one example, the material is an alloy of Fe, Nb, Mo and B, of the form Fe(Nb, Mo)B, where x is in the range 18-28, y is in the range 35-45, and z is in the range 32-42. In another example, the material may be the alloy Fe(Nb, Mo)B. The alloy may be doped with Zr and/or W, where the Zr and/or W comprises at most 10% of the alloy.

Metallic glass coating material

An example ferroelastic ceramic composition includes at least one compound having a relative chemical formula of ABCD. Element A, element B, and element C are independently selected from different members of the group consisting of yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium. Element D is selected from the group consisting of phosphate, niobate, and tungstate. X and Y are each equal to or greater than zero and less than one. X and Y are collective less than one.

Ferroelastic ceramic compositions, applications thereof, and related methods

The disclosure is generally directed to fabrication steps, and operation principles for microelectromechanical (MEMS) transducers. In one embodiment, the disclosure relates to a texture morphing device. The texture morphing device includes: a plurality of supports arranged on a substrate to support a deformable mirror; an ITO layer; and a Distributed Bragg Reflector (DBR) layer. A pair of adjacent supports form a cavity with the ITO layer and the deformable mirror. When the height of the cavity changes responsive to an external pressure, the internal reflection within the cavity is changed. The change in the height of the cavity causes the exterior texture to morph. Similar principles are disclosed for constructing sensor and actuators.

Method and apparatus for forming MEMS device

The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.

Method for microcontact printing of MEMS

Method for forming a MEMS capacitor array

Growing community of inventors

Lakewood, CO, United States of America

Corinne E Packard