Massachusetts Institute of Technology

Corey W Stull

Rabindra N Das

William D Oliver

Mark A Gouker

Vladimir Bolkhovsky

Danna Rosenberg

David J Hover

Jonilyn L Yoder

Xhovalin Miloshi

A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called 'device') is provided as a substantially high quality factor, low loss superconducting device.

Superconducting integrated circuit

Growing community of inventors

Leominster, MA, United States of America

Corey W Stull