Globalfoundries U.S. Inc.

Colleen Meagher

Yusheng Bian

Ajey Poovannummoottil Jacob

Judson Robert Holt

Andreas Daniel Stricker

Karen A Nummy

Michal Rakowski

Won Suk Lee

Lin Jiang

Structures including an optical component and methods of forming a structure including an optical component. The structure includes an optical component on a substrate, and a back-end-of-line stack including multiple metal levels. Each of the metal levels includes a dielectric layer and metal features positioned over the optical component as metal fill in the dielectric layer. The metal features in at least two of the metal levels are arranged to overlap such that the optical component is fully covered normal to the substrate.

Photonics chips with ambient light shadowing of optical components

Structures for a photodetector and methods of fabricating a structure for a photodetector. A photodetector may have a light-absorbing layer comprised of germanium. A waveguide core may be coupled to the light-absorbing layer. The waveguide core may be comprised of a dielectric material, such as silicon nitride. Another waveguide core, which may be comprised of a different material such as single-crystal silicon, may be coupled to the light-absorbing layer.

Multiple waveguide coupling to one or more photodetectors

Structures including a waveguide core and methods of fabricating a structure that includes a waveguide core. A dielectric layer including a trench with a first sidewall and a second sidewall, and a waveguide core positioned inside the trench between the first and second sidewalls of the trench. The waveguide core has a first width, and the trench has a second width between the first and second sidewalls that is greater than the first width.

Trench-based optical components for photonics chips

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Beacon, NY, United States of America

Colleen Meagher