Cirrus Logic Inc.

Colin Wei Hong Chung

Scott Lyall Cargill

Colin Robert Jenkins

James Thomas Deas

Marek Sebastian Piechocinski

Micro-electro-mechanical system (MEMS) devices are disclosed, including a MEMS device comprising a semiconductor die including integrated circuitry, a structure mounted on the semiconductor die and covering at least a portion of the circuitry, the structure defining a space between the structure and the at least a portion of the circuitry, and a transducer including a membrane, the transducer located outside of the space.

MEMS device

The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.

Growing community of inventors

Edinburgh, United Kingdom

Colin Wei Hong Chung