The Boc Group, Inc.

Edwards Limited

Colin Michael Harrison

Darren Mennie

Ron C Lee

Nicholas Benjamin Jones

Joanne Rachel Greenwood

Makoto Kaneko

Apparatus is described for combusting exhaust gases output from a plurality of process chambers. The apparatus comprises a plurality of exhaust gas combustion nozzles () connected to a combustion chamber (). Each nozzle receives a respective exhaust gas (), and comprises means for receiving a fuel () and an oxidant () for use in forming a combustion flame within the chamber. A controller receives data indicative of the chemistry of the exhaust gas supplied to each nozzle, and adjusts the relative amounts of fuel and oxidant supplied to each nozzle in response to the received data. This can enable the nature of each combustion flame to be selectively modified according to the nature of the exhaust gases to be destroyed by that flame, thereby enhancing the destruction rate efficiency of the exhaust gas and optimising fuel consumption.

Gas combustion apparatus

Apparatus for producing liquid or solid xenon comprises a ducthaving an inletfor receiving gaseous xenon and an outletfor outputting gaseous xenon at a reduced temperature to a nozzle located in a vacuum chamber. A housingextends about the duct and contains a halocarbon coolant in thermal contact with the duct, and a second ductin thermal contact with the halocarbon coolant for conveying a flow of liquid nitrogen through the housingto control the temperature of the halocarbon. In view of the difference in the pressure of the xenon gas output from the duct and the pressure in the chamber, the thus-cooled gas is caused to liquefy or solidify in the vicinity of the nozzle.

System for liquefying or freezing xenon

Growing community of inventors

Bath, United Kingdom

Colin Michael Harrison