Applied Materials, Inc.

Colin Fox

Stephen Moffatt

Norman L Tam

Leonid Mark Tertitski

Kim Ramkumar Vellore

Aaron Jacob Miller

Dinesh Kanawade

Michael Liu

Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.

Visual feedback for process control in RTP chambers

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Austin, TX, United States of America

Colin Fox