L'air Liquide Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude

American Air Liquide, Inc.

Cole Ritter

Jean-Marc Girard

Peng Zhang

Gennadiy Itov

Manish Khandelwal

Glenn Kuchenbeiser

Sean Kerrigan

Antonio Sanchez

Matthew Damien Stephens

Zhiwen Wan

Guillaume Husson

Reno Pesaresi

Yang Wang

David Orban

Nicolas Blasco

Larry Kit-wing Leung

Grigory Nikiforov

A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N&#x2014;H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N&#x2014;H free repeating units having the formula [&#x2014;N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.

Perhydropolysilazane compositions and methods for forming oxide films using same

Solid or liquid N&#x2014;H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [&#x2014;N(SiH)(SiH&#x2014;)], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.

N&#x2014;H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications

Methods of synthesizing Si&#x2014;H containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.

Preparation of Si-H containing iodosilanes via halide exchange reaction

N&#x2014;H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications

Preparation of Si&#x2014;H containing iodosilanes via halide exchange reaction

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Easton, PA, United States of America

Cole Ritter