Leybold Gmbh

Oerlikon Leybold Vaccum Gmbh

Clive Tunna

Peter Birch

Robert Jenkins

Thomas Dreifert

Robert Jentkins

A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.

Dry vacuum pump with pressurized bearing and seal

A Roots pump comprises a plurality of multi-toothed rotary pumps, each forming a pump stage, and connection channels connecting respective adjacent pump stages. The invention provides that the connection channels are arranged in partitioning walls separating the adjacent pump stages.

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Sussex, United Kingdom

Clive Tunna