Edwards Limited

Clive Marcus Lloyd Tunna

Andrew James Seeley

Christopher Mark Bailey

Duncan Michael Price

Gary Peter Knight

Michael Roger Czerniak

Derek Martin Baker

Darren Mennie

Ingo Stephen Graham

Jack Raymond Tattersall

Donovan Collins

Mark Christopher Hope

Roland Paul Gregor Kusay

Richard Wakefield

Roland Gregor Paul Kusay

Frederick John Underwood

Mark Hope

Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor using isolation device; an ignition device which is located within the test chamber for igniting any flammable fluid mixture present therein; and sensor associated with the test chamber for monitoring a parameter indicative of combustion within the test chamber and for outputting a signal indicative of the parameter to a controller.

Apparatus for detecting a flammable atmosphere within a compressor, in particular a vacuum pump

A method of inhibiting combustion within a vacuum pump is provided. The method steps include monitoring and composition of a fluid within the pump and supplying purge gas to the pump to inhibit the onset of a combustion of the fluid. There is also provided a pumping arrangement comprising a vacuum pump () together with means () for supplying purge gas to the pump. Sensor means () are provided for outputting a signal indicative of the onset of a combustion condition within the pump. Control means () receive the signal and, in turn, actuate the supply means () dependant on the signal received.

Vacuum pump

A pump having a rotor, a stator, a housing enclosing the rotor and the stator, the housing having an inlet for a fluid, and a port for receiving a fluid which acts on deposits on a surface of the rotor and on a surface of the stator positioned downstream from the inlet.

Rotary piston vacuum pump with washing installation

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Bolney, United Kingdom

Clive Marcus Lloyd Tunna