Motorola Corporation

Other

Clinton Haris

Mark Hiatt

Martin Peiter

Michael Lering

Larry E Frisa

Volker Tegeder

A conveyor element ( ) for conveying wafer receptacles between a conveyor ( ) and a loading station ( ) of a manufacturing system in the semiconductor industry has a lifting mechanism ( ) to move the wafer receptacle from a first position of the conveyor ( ) or the loading station ( ) into a second position of the conveyor ( ) or of the loading station ( ) substantially in a vertical direction. Rollers ( ) are provided to move the wafer receptacle from the second position of the conveyor ( ) along a substantially horizontal direction to the second position of the loading station ( ) or from the second position of the loading station ( ) to the second position of the conveyor ( ).

Conveying element and conveyor means for conveying wafer receptacles, and method

A vehicle ( ) for transporting a container ( ) and for loading and unloading a load port ( ) is disclosed. The vehicle ( ) comprises a frame ( ), a container holder ( ) mounted to the frame ( ), and front wheels ( ) and rear wheels ( ) mounted to the frame ( ). The front wheels ( ) are movable with respect to the rear wheels ( ), so that the critical footprint of the vehicle is reduced during loading and unloading. The vehicle is particularly useful in personal guided systems and methods for loading and unloading wafer containers.

Vehicle, system and method for loading and unloading

An apparatus related to a lot signalling device used to find misplaced lots. A remote control signalling device comprises a receiver section ( ) for receiving an RF-command including a unique address of at least one of said plurality of remote control signalling devices ( ) from a central control unit ( ), an address memory ( ) for storing the address of said remote control signalling device, an output section ( ) for signalling an alarm upon receiving the RF-command, if said address included in the RF-command matches the stored address in said address memory ( ). A method for processing items at different process stages comprises the steps of: transmitting RF-commands including a unique address of at least one of said plurality of remote control signalling devices by a central control unit ( ), signalling an alarm by said remote control signalling device ( ) upon reception of an RF-command from said central control unit ( ).

Lot signalling device

In a transportation system ( ) for wafers, a wafer container ( ) has kinematic coupling grooves, and a support surface ( ) has kinematic coupling pins. Grooves and pins are at least partially electrically conductive to allow monitoring the correct position of the container by measuring electrical resistance, as well as to allow signal exchange to and from the container ( ). The kinematic coupling pins have first and second surface areas that are electrically isolated.

Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method

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Dresden, Germany

Clinton Haris