International Business Machines Corporation

Clint D Snyder

Robert Fontana

David A Thompson

Celia E Yeack-Scranton

Mason L Williams, Iii

Howard Gordon Zolla

Patrick Rush Webb

Christopher H Bajorek

James Bernard Kruger

Christopher H Bajhorek

A bi-layer anti-reflective coating for use in photolithographic applications, and specifically, for use in ultraviolet photolithographic processes. The bi-layered anti-reflective coating is used to minimize pattern distortion due to reflections from neighboring features in the construction of microcircuits. The bi-layer anti-reflection coating features a first layer, an absorption layer, disposed on a second layer, a dielectric layer, which is then disposed between a substrate and a photoresist layer. The dielectric/absorption layer comprises one combination selected from Ta/AlO, Ta/SiO, Ta/TiO, Ta/TaO, Ta/CrO, Ta/SiN, Ti/AlO, Ti/SiO, Ti/TiO, Ti/TaO, Ti/CrO, Ti/SiN, Cr/AlO, Cr/SiO, Cr/TiO, Cr/TaO, Cr/CrO, Cr/SiN, Al/AlO, Al/TiO, Al/TaO, Al/CrO, Al/SiN, Ni/AlO, Ni/SiO, Ni/TiO, Ni/TaO, Ni/CrO, Ni/SiN, Ir/AlO, Ir/SiO, Ir/TiO, Ir/TaO, Ir/CrO, and Ir/SiN. At least the absorption and dielectric layers can be formed using vacuum deposition. A unique character of the bi-layer anti-reflective coatings is that it allows a thinner anti-reflection layer that has a wider process latitude.

Structure for photolithographic applications using a multi-layer anti-reflection coating

An integral combination magnetic transducer and suspension assembly suitable for use in both contact recording and in winchester-type applications. A generally rectangular elongated flat suspension member includes a vertical-type inductive read/write transducer formed integrally with the suspension member and is embedded in one end of the suspension member. The vertical inductive transducer is suitable for vertical recording applications. The transducer vertical magnetic pole tip and magnetic yoke structure are formed at one end of the suspension member with the vertical pole tip extending to and exposed at an air bearing surface formed on the lower surface of a slider-shaped protrusion extending from the lower surface of the end of the suspension member. The integral transducer/suspension assembly can be adapted for either flying above the recording media or for use in continuous contact with the recording media. The air bearing surface is formed on the lower surface of a wear pad. The fabrication of the transducer/suspension assembly is adapted to be performed at the wafer level.

Method of making a integrated transducer-suspension assembly for

An integral combination magnetic transducer and suspension assembly suitable for use in both contact recording and in winchester-type applications is described. A generally rectangular elongated flat suspension member includes a vertical-type inductive read/write transducer formed integrally with the suspension member and is embedded in one end of the suspension member. The vertical inductive transducer is suitable for vertical recording applications. The transducer vertical magnetic pole tip and magnetic yoke structure are formed at one end of the suspension member with the vertical pole tip extending to and exposed at a air bearing surface formed on the lower surface of a slider-shaped protrusion extending from the lower surface of the end of the suspension member. The integral transducer/suspension assembly can be adapted for either flying above the recording media or for use in continuous contact with the recording media. The air bearing surface is formed on the lower surface of a wear pad. The fabrication of the transducer/suspension assembly is adapted to be performed at the wafer level.

Integrated transducer-suspension assembly for vertical recording

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Monte Sereno, CA, United States of America

Clint D Snyder