Brewer Science, Inc.

Claudia Scott

James E Lamb, Iii

Vandana Krishnamurthy

Qin Lin

Yubao Wang

Carlton Ashley Washburn

Nickolas L Brakensiek

Methods of forming microelectronic structure are provided. The methods comprise the formation of T-shaped structures using a controlled undercutting process, and the deposition of a selectively etchable composition into the undercut areas of the T-shaped structures. The T-shaped structures are subsequently removed to yield extremely small undercut-formed features that conform to the width and optionally the height of the undercut areas of the T-shaped structures. These methods can be combined with other conventional patterning methods to create structures having extremely small feature sizes regardless of the wavelength of light used for patterning.

Growing community of inventors

Sullivan, MO, United States of America

Claudia Scott