Stmicroelectronics S.r.l.

Politecnico Di Milano

Claudia Comi

Alberto Corigliano

Alessandro Tocchio

Luca Giuseppe Falorni

Barbara Simoni

Valentina Zega

Leonardo Baldasarre

Sarah Zerbini

A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

Frequency modulation MEMS triaxial gyroscope

An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

Acceleration and angular velocity resonant detection integrated structure, and related MEMS sensor device

A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Detection structure for a Z-axis resonant accelerometer

A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

MEMS resonant accelerometer having improved electrical characteristics

A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by elastic elements to be suspended above the substrate. The elastic elements enabling inertial movements of the inertial mass along a first axis of detection and a second axis of detection that belong to a plane of main extension of said inertial mass, in response to respective linear external accelerations. At least one first resonant element and one second resonant element have a respective longitudinal extension, respectively along the first axis of detection and the second axis of detection, and are mechanically coupled to the inertial mass through a respective one of the elastic elements to undergo a respective axial stress when the inertial mass moves respectively along the first axis of detection and the second axis of detection.

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Milan, Italy

Claudia Comi