U.S. Philips Corporation

Claude E Hily

Jean Le Bris

Marko Erman

Guy N Martin

Jean-Jacques Hunzinger

Jacqueline-Madeleine Michel

Jean-Pierre Cabanie

The invention relates to an optical sample illumination device for a spectroscopic ellipsometer of the rotating analyzer type. The image of the exit slit (F') of a monochromator is conjugated with a point (F'.sub.2) of a surface of a sample (E) by means of two spherical mirrors (M.sub.7 and M.sub.8). An astigmatism correction slit (F'.sub.15) is arranged in the proximity of the conjugate (F'.sub.1) of the exit slit(F') of the monochromator with respect to the spherical mirror (M.sub.7) and is arranged perpendicularly to this exit slit and to the optical path so that said correction slit is conjugated with the said point (F'.sub.2) through the spherical mirror (M.sub.8). A luminous spot without astigmatic errors is thus obtained.

Optical sample illumination device for a spectroscopic ellipsometer

Optical viewing or projection device, comprising at least two objectives (L.sub.1 L.sub.2) whose optical axes (x.sub.1 x'.sub.1 ; x.sub.2 x'.sub.2) are parallel to a general axis of symmetry (xx') of the device, endowed with a focusing system permitting the formation of images or viewing in a fixed reference plane (P'.sub.0), by means of simultaneous translation of the objectives in parallel to the general axis of symmetry, and comprising means for reducing the parallax produced by the objectives, the means for reducing the parallax including a system of parallel-faced plates (M.sub.1 M.sub.2) which has the general axis of symmetry (xx') of the optical device as its axis of symmetry, wherein a parallel-faced plate is placed between each objective (L.sub.1, L.sub.2) and the fixed reference plane (P'.sub.0) and wherein each plate is inclined to the optical axis of the objective to which it is applied at an angle determined as a function of the thickness and of the refractive index of the material of the plate, and as a function of the focal lengths and of the distance between objectives, to produce a constant transverse offset of the points in the fixed reference plane which are conjugates of the points of the general axis of symmetry of the device, whatever the position of these points on this axis, the means for reducing the parallax additionally include a system (10, 11, 12, 3, 4) permit correlation of the rotation of the parallel-faced plates with a system for focusing the objectives.

Optical viewing or projection device

An optical coupling device for coupling a first optical waveguide having an end face and transmitting a number N of signals of different wavelengths with a number N of further optical waveguides having end faces and each transmitting one of these signals comprises means for the spectral selection of these signals, which means include a wavelength separator with interference filters, and means for the spatial selection of these signals in order to achieve this coupling. According to the invention all of the end faces are situated in the same plane P, said means comprise N spherical surfaces situated after each other, the (N-1) first spherical surfaces relative to the plane P being provided each with one of said interference filters the spherical surface which is remotest from the plane P being provided with either a totally reflecting or with an interference filter and the of curvature of the spherical surfaces being situated in the plane P midway the end face of the first optical waveguide and one of the end faces of the further optical waveguides.

Optical coupling device for optical waveguides

A device for coupling a light source and an optical waveguide. The light source has an emissive surface whose dimensions are of the same order of magnitude as or smaller than the cross-sectional dimension of the waveguide. The coupling device comprises a ball lens, which is contact with the light source, and a convergent optical transfer system. The optical transfer system images the input face of the waveguide to the optical center of the ball lens with a magnification of approximately -1. The radiation issuing from any point of the emissive surface of the light source enters the waveguide as parallel rays.

Device for coupling a light source and an optical waveguide

A multi-axial objective, comprising a number of adjacently arranged elementary systems which are formed by three spheres, the centers of which are situated on the same line, said systems being symmetrically arranged with respect to the center of the central sphere. The refractive index of the central sphere is larger than the refractive index of the outer spheres. The entrance and the exit of each system are adjoined by windows which form an entrance pupil and an exit pupil, the former being arranged in the center of the entrance sphere, while the latter is arranged in the center of the exit sphere. The windows are proportioned with respect to the diameter of the spheres so that the field of each system overlaps the field of the directly adjoining systems, the field image of the multi-axial objective being uniformly illuminated.

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Ozouer-le-Voulgis, France

Claude E Hily