Commissariat a L'energie Atomique

Other

Incam Solutions

Claude Doche

Jean-Christophe Rostaing

Didier Cruz

Fran&ccedil;ois Coeuret

Philippe Spinelli

Sylvain Scotto D'Apolinia

An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be used. A side wall of the adapter device comprises a guiding aperture enabling the carrier pod to pass to bring the first door and its lock into alignment with a front support plane of the side wall. A controller is provided to couple the first door with a second door and to unlock the first door when the side wall accosts against a front face of the interface device.

Adapter device for carrier pods containing at least one flat object in an ultraclean atmosphere

A coupling system for the transfer of a flat object from a confinement box towards a processing unit for processing the flat object. The coupling system includes a first shutter, at least one second opening, a second shutter, and a third shutter associated with the second opening on a side facing the processing unit, and devices for releasing the first, second and third shutter, after coupling the transfer opening of the confinement box with the transfer opening of the processing unit, in order to allow the transfer of the object between the confinement box and the processing unit.

Coupling system for the transfer of a confined planar object from a containment pod to an object processing unit

The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.

Storage box for an object to be protected against physicochemical contamination

The present invention relates to a device and process for transporting flat objects confined in a specific atmosphere. The device comprises at least one assembly provided with several thin, flat cells (,) that open onto a lateral face (,) of said assembly with the cells arranged in parallel and linked by the same ventilation system. Each cell is constructed to receive a flat object (,) and is closed by an independent door (,). The cells are arranged in tandem and the device includes assembly means for interlocking an upper cell to an adjacent lower cell in each successive pair and in a complementary arrangement.

Device for transporting flat objects and process for transferring said objects between said device and a processing machine

A box is provided for confining a semiconductor water in an ultra clean atmosphere between working or storage points. It is mainly constituted by a body closed by a door and equipped with a gas distributing block making it possible to diffuse a quasi-laminar flow around the article within the body.

Flat box for confining a flat article under a special atmosphere

The system according to the invention makes it possible to handle and transfer flat objects under an ultraclean atmosphere without using white rooms. It essentially comprises interfaces (5) making it possible to receive individual boxes (1), each of which contains a flat object, opening each box and feeding each flat object into a working station (6A). The system is completed by tunnels (4) making it possible to transfer the flat objects from one working station (6A, 6B) to another.

System for the handling and confinement of flat objects in individual

According to the present invention, a system for storing and distributing flat objects to different working stations is provided. The system comprises storage modules (2), transportation or conveying modules (4, 4A) and distribution modules (5). All these modules are placed alongside one another to form a continuous chain. Each module has fixed or mobile rollers (7) constituting two superimposed displacement tracks for operating in two opposite directions. Portable racks (20) are also provided. Particular utility is found in storage and transportation of boxes containing silicon wafers.

System for the storage and transportation of flat objects such as

The invention permits the transfer between two containers of an object without the latter being in contact with the atmosphere around the containers. The system comprises two doors (12, 22) joined tightly to one another in such a way that the outer faces (13, 23) of these doors are positioned facing one another during opening, e.g. by winding the same around a drum (21). These doors are constituted by two flexible curtains sliding in lateral carriages. The system is particularly applicable to the production of semiconductor wafers or slices in an ultraclean atmosphere.

Growing community of inventors

Claix, France

Claude Doche