L'air Liquide, Soci&#xe9;t&#xe9; Anonyme Pour L'etude Et L'exploitation Des Proc&#xe9;d&#xe9;s Georges Claude

L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des

Claude De Saint Etienne

Michel Moisan

Jean-Christophe Rostaing

Francedillaois Coeuret

Fran&ccedil;ois Coeuret

An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.

Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them

A process for treating perfluorinated and/or hydrofluorocarbon gases, comprising the steps of

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Orsay, France

Claude De Saint Etienne