Entegris, Inc.

Applied Materials, Inc.

Clari Nolet

Steven E Haumersen

Scott Elfstrom

Thomas D Johnson

William Smeaton

Kathleen L Hanson

Michael E Wilmer

Terry P Reiss

Sherry Cordova

Natalia Kroupnova

Yukari Nishimura

Richard C Lyon

Woon Young Toh

Terry Lee Doyle

Evgueni Lobovski

Inna Louneva

Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.

Systems and methods for managing material storage vessels having information storage elements

The present invention provides a semiconductor processing device () including a tool () having one or more sensors, a primary data communication port () and a secondary data communication port (). A sensor data acquisition subsystem () acquires sensor data from the tool via the secondary port (). The data acquisition subsystem () acquires MES operation messages via the primary port (). Sensor data are communicated to a sensor processing unit () of a sensor data processing subsystem (). The sensor processing unit () processes and analyzes the sensor data. Additionally, the processing unit () can be adapted for making product or processing related decisions, for example activating an alarm if the process is not operating within control limits. In another embodiment, the present invention provides a method and apparatus for processing data from a wafer fab facility () including a plurality of tools () each having a primary data communication port () and a secondary data communication port ().

Wafer fabrication data acquisition and management systems

Growing community of inventors

Los Altos, CA, United States of America

Clari Nolet