Commissariat a L'energie Atomique

Claire Divoux

Pierre Gaud

Jérôme Delamare

Thierry Enot

Marie-Helene Vaudaine

Fabien Filhol

Cedrick Chappaz

Frédéric Lepoitevin

The invention relates to a method for making an actuation system for an optical component comprising:

Optical components and production thereof

An electrostatic actuator including: at least one fixed electrode, fixed with respect to a substrate; at least one flexible electrode arranged to face the substrate; a pivot member extending from the flexible electrode, the pivot member being fixed to a face of the flexible electrode facing the fixed electrode, and the pivot member being made from a conducting material; and at least one suspending unit suspending the flexible electrode and holding the flexible electrode at rest at a distance from the substrate, wherein the suspending unit and the pivot member are different.

Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator

Micro-mirror or micro-lens made up of a moving part () with a reflective or refringent zone (), a fixed part (), means of connection () of the moving part () to the fixed part () which forms an axis of rotation () for the moving part () and of means for controlling () the rotation. The means of control include two or more actuators () arranged either side of the axis (), each formed of a fixed electrode () forming part of the fixed part () and a moving electrode () possessing a free end () and an end connected to a drive arm () which is substantially parallel to the axis () and emerging from the moving part (). The moving electrode () adheres to the fixed electrode () from its free end () when a voltage is applied to the actuator (), the adhesion is a function of the applied voltage. Application to optical systems.

Electrically rotationally actuatable micro-mirror or micro lens

An actuator is described having two fixed magnetic structures, and a mobile magnetic part able to move towards either one of the two ends of the magnetic structures. The actuator can be in the form of a microactuator, and can be used in the fabrication of microrelays, microvalves, and micropumps.

Bistable magnetic actuator

Magnetic actuator having a closed magnetic circuit () capable of guiding a magnetic flux. The magnetic circuit () comprises a fixed magnetic part () with a yoke () and a mobile part (), magnetically connected to each other and also at least one main air gap () delimited by at least one portion () of the mobile part () and by the yoke (). In the main air gap (), the flux is closed by being set up approximately transverse to the mobile part (). The fixed part () also comprises flux recuperation means () that contribute with the mobile part () to delimiting an auxiliary air gap () in which the magnetic flux is set up laterally to the mobile part (). The flux is contained on each side of the main air gap (), on one side by the yoke (), and on the other side jointly by the mobile part () and the flux recuperation means () through the part () contributing to delimiting the main air gap (). The auxiliary air gap () has a dimension in the direction in which magnetic flux is set up that is minimum in at least one area of the portion () contributing to delimiting the main air gap ().

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Grenoble, France

Claire Divoux