Shenzhen Technology University

Chuyu Zhong

Hui Li

Jian Feng

Shupeng Deng

Nannan Li

Zhao Chen

Cunzheng Ning

Wanxian Xu

Jinlong Lu

Shihao Ding

Zhenhuan Qiu

Wei Miao

Shaochi Pan

Shilong Zhao

Provided are a new vertical cavity surface emitting laser structure and a manufacturing method thereof. The structure includes a substrate layer, a lower N-type DBR, an active region, an upper N-type DBR and a mixed dielectric DBR sequentially arranged from bottom to top, where a second-class tunnel junction is arranged on one side of the active region close to the upper N-type DBR, where the second-class tunnel junction is embedded in a bottom of the upper N-type DBR and surrounded by the upper N-type DBR, and the substrate layer, the lower N-type DBR, the active region, the upper N-type DBR, the mixed dielectric DBR and the second-class tunnel junction are all coaxial elliptical cylinders; negative electrodes are arranged on the lower N-type DBR, and positive electrodes are arranged on the upper N-type DBRs substrate layer.

Vertical cavity surface emitting laser structure and manufacturing method thereof

Provided is an elliptical multi-mesa laser structure, including a substrate layer, an N-DBR, a functional layer and a P-DBR sequentially arranged from bottom to top. The substrate layer is fixedly connected with an N contact layer. The N-DBR is fixedly connected to a top of the substrate layer, and the N contact layer is arranged around the N-DBR. A space layer is inserted in the N-DBR. The functional layer is fixedly connected to a top of the N-DBR. The P-DBR is fixedly connected to a top of the functional layer, and a top of the P-DBR is fixedly connected with a P contact layer. Another space layer is inserted into the P-DBR.

Elliptical multi-mesa laser structure

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Shenzhen, China

Chuyu Zhong