Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Chunxia Huang

Gang Wang

Jie Jiang

Ruzhan Lu

Weiwang Sun

Songli Hu

Jiyuan Mou

A wafer pre-alignment device is disclosed, including a first unit configured to drive a wafer to rotate or move upward or downward, a second unit configured to drive the wafer to translate, and a position detector including a light source, a lens and an image sensor. A light beam from the light source passes through the wafer and the lens and thereby provides information indicating a position of the wafer to the image sensor. The first unit and the second unit are able to adjust the position of the wafer based on the information obtained by the image sensor. A method for pre-aligning a TSV wafer is also disclosed.

Silicon wafer pre-alignment device and method therefor

Growing community of inventors

Shanghai, China

Chunxia Huang