Tokyo Electron Limited

Chunmui Li

Takamasa Chikuma

Keiji Osada

Gaku Ikeda

Kunio Takano

Satoshi Gomi

Koichi Miyashita

Kozo Kai

In STEP, a mapping operation is carried out by a mapping device. In STEP, based on position information for the wafer (W) detected by the mapping operation, it is determined whether or not a wafer (W) position is in an abnormal state or not. When the wafer position is determined to be in the abnormal state (Yes), a closing/opening operation, in which a FOUP door () is temporarily closed and then opened, is carried out in STEP. In STEP, the number of times the FOUP door () is closed/opened (in other words, the number of times a port door () is closed/opened) is counted, and in STEP, it is determined whether or not this count value is less than a preset value. If the count value is less than the preset value (Yes), the processing in STEP-STEPis repeated once again.

Substrate processing system and substrate position correction method

A semiconductor manufacturing system includes circuitry configured to execute: displaying a screen for selecting an inspection set including inspection items having a manipulation item and/or a check item; retrieving the inspection items, arranging the inspection items in the order of workflow, and displaying each inspection item on a screen with an execution attribute indicating whether each inspection item is 'automatic' or 'manual' execution; receiving an inspection start command and reading the first inspection item from a storage unit. The circuitry also executes steps corresponding to the following cases (a) to (d) until there are no more inspection items: (a) the read-out inspection item being the manipulation item and &#x201c;automatic&#x201d;; (b) the read-out inspection item being the manipulation item and &#x201c;manual&#x201d;; (c) the read-out inspection item being the check item and &#x201c;automatic&#x201d;; and (d) the read-out inspection item being the check item and &#x201c;manual&#x201d;.

Semiconductor manufacturing system

Growing community of inventors

Nirasaki, Japan

Chunmui Li