Semes Co., Ltd.

Other

Cevo Mobility Corp.

Chung Woo Lee

In Kyu Park

Yong Seok Jang

Sung Youn Jeon

Yong Kuk Park

Chang Jun Park

Jin Hwan Kim

Tae Dong Park

Sung Hyuk Jung

Proposed are a wafer position detection apparatus and a wafer position detection and correction method using the same. More specifically, proposed is an apparatus for wafer placement teaching for adjusting a position of a wafer disposed on an electrostatic chuck, the apparatus including a laser distance sensor disposed above the electrostatic chuck, and a controller configured to control a robot configured to transfer the wafer. The controller checks a relative position of the electrostatic chuck and the wafer disposed on the electrostatic chuck using the laser distance sensor so that the wafer is transferred to a predetermined position, and teaches the position of the wafer using the checked relative position of the electrostatic chuck and the wafer.

Apparatus for wafer placement teaching and method for wafer placement teaching using the same

Provided is a gap measuring method capable of accurately measuring a gap between adjacent members. The gap measuring method includes preparing an equipment to be measured including a first member and a second member, obtaining a first image by capturing the equipment to be measured using a photographing module of a first setting while irradiating a laser to the equipment to be measured, wherein the first image includes a first laser line image corresponding to a surface of the first member and a second laser line image corresponding to a surface of the second member, modifying the photographing module from the first setting to a second setting based on a maximum width of the second laser line image in the first image, obtaining a second image by capturing the equipment to be measured using the photographing module of the second setting while irradiating a laser to the equipment to be measured, and calculating a gap between the first member and the second member based on a discontinuous region between the first laser line image and the second laser line image in the second image.

Apparatus and method for measuring the gap

The inventive concept provides a support unit for supporting a substrate. The support unit includes a heating unit for heating the substrate, and wherein the heating unit includes: a plurality of heating members; and a plurality of first power lines and a plurality of second power lines providing a supply and return pathway for a power to and from the plurality of heating members, and wherein the plurality of second power lines are connected to each of the plurality of first power lines through the plurality of heating members, and at least two heating members are connected to each first power line and at least two heating members are connected to each second power line, and at least two heating members are connected in parallel between each first power line and each second power line.

Support unit, heating unit and substrate treating apparatus including the same

A support unit may include a plurality of heaters disposed in a matrix form in the support unit to heat a substrate, and a power supply unit for supplying power to the plurality of heaters, wherein a current applied to the plurality of heaters is controlled by switches connected to rows and columns of the matrix, respectively, and the switches connected to the rows of the matrix include first switches capable of controlling the current applied to the rows of the matrix and second switches connected in parallel with the first switches.

Support unit, substrate treating apparatus including the same and temperature control method

A substrate transfer assembly that transfers a substrate includes a robot arm configured to transfer the substrate, a laser disposed at the robot arm and emitting one or more rays of light, an image sensor disposed at the robot arm and generating a photographed picture or video including an image of a front object by the one or more emitted rays of light, and a control circuit configured to control transfer of the substrate based on the image present in the photographed picture or video.

Assembly and method for transferring substrate

Disclosed is an air pressure control (APC) device according to an embodiment of the inventive concept. The air pressure control (APC) device may include a processing chamber, a plate for adjusting a pressure in the processing chamber, and an APC valve including first and second step motors for adjusting a height of the plate, and an APC controller that controls the APC valve, and the APC controller may include a first controller that controls positions of the first step motor and the second step motor; and a second controller that compensates for a difference in position between the first step motor and the second step motor.

Air pressure control device

A system and method for setting a regenerative braking value are disclosed. The disclosed system may include: a first measurement unit configured to measure the displacement information of a brake pedal of an electric vehicle; a second measurement unit configured to measure the speed of the electric vehicle; a third measurement unit configured to measure the distance from the electric vehicle to an object in front of the electric vehicle; a first computation unit configured to compute the brake force required for a deceleration of the electric vehicle by inputting the displacement information and the speed into a first fuzzy logic algorithm; and a second computation unit configured to compute the regenerative braking value by applying the brake force and the distance to the object to a second fuzzy logic algorithm.

System and method for setting regenerative braking value

A fluorescent lamp lighting circuit is disclosed in which an instant lighting is possible, and a high reliability is ensured. Further, the circuit is compact, and the cost is low. The fluorescent lamp lighting circuit according to the present invention includes a discharge circuit section including a choke coil serially connected to a filament of a fluorescent lamp. It further includes a lighting circuit section connected serially to the filament and the choke coil so as to be turned on at certain intervals by supplying the power, and so as to be turned off after the starting of the glow discharge of the fluorescent lamp. It further includes a protecting circuit section for turning off the light circuit section after certain repetition of on/off operations of the lighting circuit section.

Growing community of inventors

Suwon-si, South Korea

Chung Woo Lee