California Institute of Technology

Chung-Wah Fon

Michael Roukes

Hongxing Tang

Wonhee Lee

Blake Waters Axelrod

John Liang Tan

A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Polymer NEMs for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

Polymer NEMS for cell physiology and microfabricated cell positioning system for micro-biocalorimeter

Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Microscale calorimeter

Growing community of inventors

Camarillo, CA, United States of America

Chung-Wah Fon