Taiwan Semiconductor Manufacturing Comp. Ltd.

National Taiwan University

Chung-Ting Ko

Chi On Chui

Tai-Chun Huang

Jr-Hung Li

Tze-Liang Lee

Sung-En Lin

Bo-Cyuan Lu

Mei-Yun Wang

Fu-Kai Yang

Chen-Ming Lee

Chi-On Chui

Chunyao Wang

Chih-Chung Chang

Yi-Hsiu Liu

Wan-Chen Hsieh

Yuan-Ching Peng

Jiun-Ming Kuo

Ting-Gang Chen

You-Ting Lin

Jen-Hong Chang

Kuo-Yi Chao

Chia-Hui Lin

Po-Hsien Cheng

Chia-Cheng Chao

Yun Lee

Wen-Ju Chen

Hong-Hsien Ke

Yung-Chih Wang

Shih-Wen Huang

Jr-Yu Chen

Han-Chi Lin

Wen-ju Chen

Yung-Cheng Lu

Yi-Hung Lin

I-Wen Wu

Bor Chiuan Hsieh

Chun-Han Chen

Chien Chung Huang

Bi-Fen Wu

Ching Yu Huang

Kun-Mo Lin

Li-Fong Lin

Wan Chen Hsieh

Kuang-Yuan Hsu

Chun-Yi Lee

Ya-Lan Chang

Ming-Fa Wu

Po-Wei Liang

Wen-Shiang Chen

Chun-Ming Lung

Tzong-Lin Jay Shieh

Tsung-Hsun Yu

Chuin-Shan Chen

Po-Shao Lin

A method for forming a semiconductor structure is provided. The method includes forming a first active region and a second active region, etching the first active region and the second active region to form a first recess and a second recess, respectively, forming the first dielectric layer over the first active region and the second active region, forming a first fill layer over the first dielectric layer to overfill the first recess and the second recess, forming a first dielectric mask over the first fill layer, etching first portions of the first dielectric mask and the first fill layer over the first active region, removing a first portion of the first dielectric layer over the first active region, and forming a first source/drain feature on the first active region.

Method for forming semiconductor structure

A method for forming a semiconductor device structure is provided. The semiconductor device structure includes a first fin structure formed over a substrate, and the first fin structure includes a plurality of first nanostructures stacked in a vertical direction. The semiconductor device structure further includes a second fin structure formed over the substrate, and the second fin structure includes a plurality of second nanostructures stacked in a vertical direction. The semiconductor device structure further includes a dummy fin structure between the first fin structure and the second fin structure. The dummy fin structure includes a first etching stop layer between a bottom portion and a top portion.

Semiconductor device structure and method for forming the same

Semiconductor structures and methods of forming the same are provided. A method according to the present disclosure includes forming a stack of epitaxial layers over a substrate, forming a first fin-like structure and a second fin-like structure from the stack, forming an isolation feature between the first fin-like structure and the second fin-like structure, forming a cladding layer over the first fin-like structure and the second fin-like structure, conformally depositing a first dielectric layer over the cladding layer, depositing a second dielectric layer over the first dielectric layer, planarizing the first dielectric layer and the second dielectric layer until the cladding layer are exposed, performing an etch process to etch the second dielectric layer to form a helmet recess, performing a trimming process to trim the first dielectric layer to widen the helmet recess, and depositing a helmet feature in the widened helmet recess.

Dielectric isolation structure for multi-gate transistors

A method includes forming a first gate stack over a first semiconductor region, depositing a spacer layer on the first gate stack, and depositing a dummy spacer layer on the spacer layer. The dummy spacer layer includes a metal-containing material. An anisotropic etching process is performed on the dummy spacer layer and the spacer layer to form a gate spacer and a dummy sidewall spacer, respectively. The first semiconductor region is etched to form a recess extending into the first semiconductor region. The first semiconductor region is etched using the first gate stack, the gate spacer, and the dummy sidewall spacer as an etching mask. The method further includes epitaxially growing a source/drain region in the recess, and removing the dummy sidewall spacer after the source/drain region is grown.

Method of forming thin dummy sidewall spacers for transistors with reduced pitches

A semiconductor device includes a substrate, a gate structure on the substrate, a source/drain (S/D) region and a contact. The S/D region is located in the substrate and on a side of the gate structure. The contact lands on and connected to the S/D region. The contact wraps around the S/D region.

Semiconductor device, FinFET device and methods of forming the same

A method includes forming an etching mask, which includes forming a bottom anti-reflective coating over a target layer, forming an inorganic middle layer over the bottom anti-reflective coating, and forming a patterned photo resist over the inorganic middle layer. The patterns of the patterned photo resist are transferred into the inorganic middle layer and the bottom anti-reflective coating to form a patterned inorganic middle layer and a patterned bottom anti-reflective coating, respectively. The patterned inorganic middle layer is then removed. The target layer is etched using the patterned bottom anti-reflective coating to define a pattern in the target layer.

Multi-layer photo etching mask including organic and inorganic materials

A semiconductor device including a gate structure disposed on a substrate is provided. The gate structure includes a work function setting layer and a work function tuning layer sequentially disposed on substrate. The work function tuning layer is in contact with an interface surface positioned between the work function setting layer and the work function tuning layer, and a material of the interface surface is different from the work function setting layer.

Method of fabricating a semiconductor device

A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a gate structure over the substrate. The semiconductor device structure also includes a spacer element covering a first sidewall of the gate structure. The semiconductor device structure further includes a source/drain portion in the substrate, and the spacer element is between the source/drain portion and the gate structure. In addition, the semiconductor device structure includes an etch stop layer covering the source/drain portion. The etch stop layer includes a first nitride layer covering the source/drain portion and having a second sidewall, and the second sidewall is in direct contact with the spacer element. The etch stop layer also includes a first silicon layer covering the first nitride layer and having a third sidewall, and the third sidewall is in direct contact with the spacer element.

Semiconductor device structure with etch stop layer for reducing RC delay

Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes an isolation structure formed over a semiconductor substrate. A first fin structure and a second fin structure extend from the semiconductor substrate and protrude above the isolation structure. A first gate structure is formed across the first fin structure and a second gate structure is formed across the second fin structure. A gate isolation structure is formed between the first fin structure and the second fin structure and separates the first gate structure from the second gate structure. The gate isolation structure includes a bowl-shaped insulating layer that has a first convex sidewall surface adjacent to the first gate structure and a second convex sidewall surface adjacent to the second gate structure.

FinFET with bowl-shaped gate isolation and method

A semiconductor device includes a first channel region, a second channel region, and a first insulating fin, the first insulating fin being interposed between the first channel region and the second channel region. The first insulating fin includes a lower portion and an upper portion. The lower portion includes a fill material. The upper portion includes a first dielectric layer on the lower portion, the first dielectric layer being a first dielectric material, a first capping layer on the first dielectric layer, the first capping layer being a second dielectric material, the second dielectric material being different than the first dielectric material, and a second dielectric layer on the first capping layer, the second dielectric layer being the first dielectric material.

Semiconductor device and methods of forming the same

A method includes etching a first portion and a second portion of a dummy gate stack to form a first opening and a second opening, respectively, and depositing a silicon nitride layer to fill the first opening and the second opening. The deposition of the silicon nitride layer comprises a first process selected from treating the silicon nitride layer using hydrogen radicals, implanting the silicon nitride layer, and combinations thereof. The method further includes etching a third portion of the dummy gate stack to form a trench, etching a semiconductor fin underlying the third portion to extend the trench down into a bulk portion of a semiconductor substrate underlying the dummy gate stack, and depositing a second silicon nitride layer into the trench.

Method of modulating stress of dielectric layers

A method includes placing a semiconductor substrate in a deposition chamber, wherein the semiconductor substrate includes a trench, and performing an atomic layer deposition (ALD) process to deposit a dielectric material within the trench, including flowing a first precursor of the dielectric material into the deposition chamber as a gas phase; flowing a second precursor of the dielectric material into the deposition chamber as a gas phase; and controlling the pressure and temperature within the deposition chamber such that the second precursor condenses on surfaces within the trench as a liquid phase of the second precursor, wherein the liquid phase of the second precursor has capillarity.

Deposition process for forming semiconductor device and system

A method includes forming a semiconductor fin protruding higher than top surfaces of isolation regions. The isolation regions extend into a semiconductor substrate. The method further includes etching a portion of the semiconductor fin to form a trench, filling the trench with a first dielectric material, wherein the first dielectric material has a first bandgap, and performing a recessing process to recess the first dielectric material. A recess is formed between opposing portions of the isolation regions. The recess is filled with a second dielectric material. The first dielectric material and the second dielectric material in combination form an additional isolation region. The second dielectric material has a second bandgap smaller than the first bandgap.

Hybrid isolation regions having upper and lower portions with seams

A semiconductor device includes a pair of fin structures on a semiconductor substrate, each including a vertically stacked plurality of channel layers, a dielectric fin extending in parallel to and between the fin structures, and a gate structure on and extending perpendicularly to the fin structures, the gate structure engaging with the plurality of channel layers. The dielectric fin includes a fin bottom and a fin top over the fin bottom. The fin bottom has a top surface extending above a bottom surface of a topmost channel layer. The fin top includes a core and a shell, the core having a first dielectric material, the shell surrounding the core and having a second dielectric material different from the first dielectric material.

Semiconductor device with a core-shell feature and method for forming the same

A method for manufacturing a semiconductor device is provided. The method includes forming a semiconductor fin over a substrate; forming an isolation feature adjacent semiconductor fin; recessing the isolation feature to form a recess; forming a metal-containing compound mask in the recess; depositing a stress layer over the metal-containing compound mask, such that the stress layer is in contact with a top surface of the metal-containing compound mask; and annealing the metal-containing compound mask when the stress layer is in contact with the top surface of the metal-containing compound mask.

Method for manufacturing semiconductor device

Growing community of inventors

Kaohsiung, Taiwan

Chung-Ting Ko