Siliconware Precision Industries Co., Ltd.

Chung-Te Yuan

Chun-Hung Lu

Guang-Hwa Ma

A semiconductor substrate is provided, including: a substrate; a plurality of conductive through vias embedded in the substrate; a first dielectric layer formed on the substrate; a metal layer formed on the first dielectric layer; and a second dielectric layer formed on the metal layer. As such, when a packaging substrate is disposed on the second dielectric layer, the metal layer provides a reverse stress to balance thermal stresses caused by the first and second dielectric layers, thereby preventing warpage of the semiconductor substrate.

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Taichung Hsien, Taiwan

Chung-Te Yuan