Taiwan Semiconductor Manufacturing Comp. Ltd.

Chung-Hui Chen

Jaw-Juinn Horng

Wan-Te Chen

Hao-Chieh Chan

Wei-Chih Chen

Yung-Chow Peng

Cheng-Hsiang Hsieh

Tung-Heng Hsieh

Chien-Hung Zordius Chen

Tsung-Hsin Yu

Po-Zeng Kang

Chii-Ping Chen

Sun-Jay Chang

Wen-Sheh Huang

Chia-Hsin Hu

Wen-Tai Wang

Tzu-Ching Chang

Ching-Wei Tsai

Der-Chyang Yeh

Hou-Yu Chen

Yu-Xuan Huang

Yimin Huang

Szu-Lin Liu

Amit Kundu

Sheng-Feng Liu

Bi-Ling Lin

Pai-Chieh Wang

Tzu Ching Chang

Kuan-Lun Cheng

Chia-Tien Wu

Kuo-Feng Yu

Jui-Cheng Huang

Ruey-Bin Sheen

Tung-Tsun Chen

Wei Chih Chen

Chia-Lin Yu

Chung-Yi Lin

Shu-Wei Chung

Chih Ming Yang

Young-Chow Peng

Weichih Chen

Hui-Zhong Zhuang

Shuo-Mao Chen

Chih-Hsien Chang

Fu-Chih Yang

Chia-Chung Chen

Shun-Liang Hsu

Chih-Yung Lin

Kuan-lun Cheng

Jen-Hao Yeh

Yean-Kuen Fang

Chung-Peng Hsieh

Tien-Chien Huang

Yung Feng Chang

Hun-Hsien Chang

Ya Yun Liu

Chien-Chun Tsai

Hsiao-Lan Yang

Jiefeng Lin

Chih-Ming Yang

Wan-te Chen

A method of manufacturing a semiconductor device based on a dual-architecture-compatible design includes: forming transistor components of in a transistor (TR) layer; and performing one of fabricating additional components according to (A) a buried power rail (BPR) type of architecture or (B) a non-buried power rail (non-BPR) type of architecture. The step (A) includes, in corresponding sub-TR layers, forming various non-dummy sub-TR structures, and, in corresponding supra-TR layers, forming various dummy supra-TR structures which are corresponding first artifacts. The step (B) includes, in corresponding supra-TR layers, forming various non-dummy supra-TR structures and forming various dummy supra-TR structures which are corresponding second artifacts, the first and second artifacts resulting from the dual-architecture-compatible design being suitable to adaptation into the BPR type of architecture.

Method of fabricating semiconductor devices having different architectures and semiconductor devices fabricated thereby

A semiconductor structure including first finfet cells and second finfet cells. Each of the first finfet cells has an analog fin boundary according to analog circuit design rules, and each of the second finfet cells has a digital fin boundary according to digital circuit design rules. The semiconductor structure further includes first circuits formed with the first finfet cells, second circuits formed with the second finfet cells, and third circuits formed with one or more of the first finfet cells and one or more of the second finfet cells.

Circuits designed and manufactured with first and second fin boundaries

An integrated circuit (IC) including a plurality of finfet cells designed with digital circuit design rules to provide smaller finfet cells with decreased cell heights, and analog circuit cell structures including first finfet cells of the plurality of finfet cells and including at least one cut metal layer. The smaller finfet cells with decreased cell heights provide a first shorter metal track in one direction and the at least one cut metal layer provides a second shorter metal track in another direction to increase maximum electromigration currents in the integrated circuit.

Circuits designed and manufactured with first and second design rules

An integrated circuit includes a p-type active zone located in an n-type well, an n-type active zone located in a p-type well, an n-type pick-up region located in the n-type well, and a p-type pick-up region located in the p-type well. The integrated circuit also includes a first power rail and a second power rail extending in a first direction, and a first conductive segment and a second conductive segment extending in a second direction. The first power rail, the p-type active zone, the n-type active zone, and the second power rail are arranged along the second direction separating from each other. The first conductive segment connects the n-type pick-up region with the first power rail, and the second conductive segment connects the p-type pick-up region with the second power rail.

Cell having stacked pick-up region

A semiconductor device includes a first conductive line extending in a first direction on a front side of a semiconductor wafer, a first power rail extending in the first direction on a back side of the semiconductor wafer, and a first transistor including a first gate structure extending in a second direction perpendicular to the first direction, first and second active regions adjacent to the first gate structure, and a first channel region extending between the first and second active regions through the first gate structure. A first via is positioned between and electrically connects the first active region and the first conductive line, and a second via is positioned between and electrically connects the second active region and the first power rail.

Semiconductor device and method

Methods of forming decoupling capacitors in interconnect structures formed on backsides of semiconductor devices and semiconductor devices including the same are disclosed. In an embodiment, a device includes a device layer including a first transistor; a first interconnect structure on a front-side of the device layer; a second interconnect structure on a backside of the device layer, the second interconnect structure including a first dielectric layer on the backside of the device layer; a contact extending through the first dielectric layer to a source/drain region of the first transistor; a first conductive layer including a first conductive line electrically connected to the source/drain region of the first transistor through the contact; and a second dielectric layer adjacent the first conductive line, the second dielectric layer including a material having a k-value greater than 7.0, a first decoupling capacitor including the first conductive line and the second dielectric layer.

Semiconductor devices including decoupling capacitors

A method includes identifying at least a first mask or a second mask, fabricating, by the first mask, a first conductive line, fabricating, by the second mask, a second conductive line, and fabricating, by the first mask, a third conductive line if a dimension of the first conductive line is larger than a corresponding dimension of the second conductive line, or fabricating, by the second mask, the third conductive line if the dimension of the first conductive line is less than the corresponding dimension of the second conductive line A first circuit element is coupled to a second circuit element by at least the third conductive line, and the first circuit element is separated from the second circuit element by a predetermined distance.

Method of manufacturing conductive lines in a circuit

The present disclosure describes structure with a substrate, a first well region, a second well region, and a third well region. The first well region is in the substrate. The second well region is in the first well region and includes a first source/drain (S/D) region. The third well region is in the substrate and adjacent to the first well region. The third well region includes a second S/D region, where a spacing between the first and second S/D regions is less than about 3 μm.

Cell placement optimization

A method of forming a semiconductor device. The method includes forming a first well of a first-type in a substrate of a second-type, forming a first active zone of the first-type in a second well of the second-type on the substrate, and forming a second active zone of the second-type in the first-type well. The method also includes forming a first pick-up region of the first-type located in the first well, and forming a second pick-up region of the second-type located in the second well. Each of the first active zone and the second active zone extends in a first direction. The first pick-up region and the second pick-up region are separated from each other, by the first active zone and the second active zone, along a direction that is different from the first direction.

A semiconductor device includes a substrate. A first nanosheet structure and a second nanosheet structure are disposed on the substrate. Each of the first and second nanosheet structures have at least one nanosheet forming source/drain regions and a gate structure including a conductive gate contact. A first oxide structure is disposed on the substrate between the first and second nanosheet structures. A conductive terminal is disposed in or on the first oxide structure. The conductive terminal, the first oxide structure and the gate structure of the first nanosheet structure define a capacitor.

Capacitor in nanosheet

A method (of forming a semiconductor device) includes: forming an active area structure extending in a first direction; forming gate structures over the active area structure and extending in a second direction substantially perpendicular to the first direction; forming contact-source/drain (CSD) conductors over the active area structure, interleaved with corresponding ones of the gate structures, and extending in the second direction; and forming first conductive segments in a first layer of metallization (M_1st layer) over the active area structure and extending in the first direction, the first conductive segments including a first gate-signal-carrying (GSC) conductor which overlaps the active area structure.

Semiconductor device, and method of forming same

An analog standard cell is provided. An analog standard cell according to the present disclosure includes a first active region and a second active region extending along a first direction, and a plurality of conductive lines in a first metal layer over the first active region and the second active region. The plurality of conductive lines includes a first conductive line and a second conductive line disposed directly over the first active region, a third conductive line and a fourth conductive line disposed directly over the second active region, a middle conductive line disposed between the second conductive line and the third conductive line, a first power line spaced apart from the middle conductive line by the first conductive line and the second conductive line, and a second power line spaced apart from the middle conductive line by the third conductive line and the fourth conductive line.

Standard cell design

An integrated circuit (IC) device includes a substrate having opposite first and second sides, an active region over the first side of the substrate, a first transistor and a second transistor over the first side of the substrate, a first conductive pattern over the first side of the substrate, and a second conductive pattern under the second side of the substrate. The first conductive pattern electrically couples a first terminal of the first transistor to a second terminal of the second transistor. The second conductive pattern electrically couples the first terminal of the first transistor to the second terminal of the second transistor.

Integrated circuit device

Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.

Zero mask high density capacitor

An integrated circuit (IC) device includes a substrate, a first active region, first and second conductive patterns, and a first through via structure. The substrate has opposite first and second sides. The first active region is over the first side of the substrate. The first conductive pattern is over and electrically coupled to the first active region. The first through via structure extends from the second side, through the substrate, to the first side in electrical contact with the first active region. The second conductive pattern is under the second side of the substrate and electrically coupled to the first through via structure.

Integrated circuit device having active region coupled to metal layers on opposite sides of substrate, and method

Growing community of inventors

Hsinchu, Taiwan

Chung-Hui Chen