Taiwan Semiconductor Manufacturing Comp. Ltd.

Chung-Hsin Chien

Jiun-Rong Pai

Chih-Hung Huang

Yang-Ann Chu

Tsung-Sheng Kuo

I-Lun Yang

Hsu-Shui Liu

Shou-Wen Kuo

Hsuan Lee

Chien-Fa Lee

Jian-Hung Chen

Boris Huang

Meng-Chen Lin

A wafer sorting and stoking system provides automated storage and retrieval of wafer frames carrying semiconductor wafers. A wafer frame cassette is received at a transfer port from a transfer system. A robot arm retrieves the wafer frames from the cassette and stores each wafer frame in a respective storage slot in one of a plurality of storage towers. The storage location of each wafer frame is recorded. Each wafer frame can be selectively retrieved and loaded into a wafer frame cassette by the robot arm for further processing.

Wafer frame sorter and stocker

A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.

System and method for ring frame cleaning and inspection

Growing community of inventors

Zhubei, Taiwan

Chung-Hsin Chien