Seagate Technology Incorporated

Chun Wai Joseph Tong

Paul Stephen McLeod

Xiaoding Ma

Samuel Lewis Tanaka

Zhaohui Fan

Thomas Larson Greenberg

Christopher Loren Platt

Chang Bok Yi

Tatsuru Tanaka

Hongling Liu

The embodiments disclose an apparatus including at least two carbon source deposition tools for emitting electrons, at least two reflective polarity rear button permanent magnets integrated into the carbon source deposition tools for reflecting emitted electrons, and at least two paired polarity Helmholtz coils integrated into the carbon source deposition tools for forming uniform parallel magnetic field lines for confining the emitted electrons to uniformly deposit carbon onto the surfaces of a two-sided media disk.

Helmholtz coil assisted PECVD carbon source

Methods and apparatus are provided for static-biasing a pre-metalized non-conductive substrate within a process chamber. A substrate holder that holds a pre-metalized non-conductive substrate is engaged by a lift mechanism that provides movement of the substrate in a first, upward direction to a contact position within the process chamber and in a second direction to a non-contact position. When the substrate holder is moved to the contact position, the substrate electrically engages a conductive spring-loaded compliance mechanism that is mounted in a fixed position within the process chamber. The spring-loaded compliance mechanism is connected to a bias-voltage feed-through for the process chamber that applies a bias voltage to the substrate via the spring-loaded compliance mechanism.

Biasing a pre-metalized non-conductive substrate

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San Jose, CA, United States of America

Chun Wai Joseph Tong