Promerus, Lcc

International Business Machines Corporation

Tokyo Ohka Kogyo Co., Ltd.

Chun S Chang

Larry Funderburk Rhodes

Pramod Kandanarachchi

Andrew Bell

Hiroshi Ito

Kotaro Endo

Leah Langsdorf

Keita Ishiduka

Xiaoming Wu

Tomoyuki Ando

Dennis A Barnes

Lawrence D Seger

Brian K Bennett

Howard A Sidaway

Edward Barnes Boden

John-Henry Lipian

Steven J Smith

John Henry Lipian

Patrick Bradley

Keita Tokyo Ohka Kogyo Co Ltd Ishiduka

Kotaro Tokyo Ohka Kogyo Co Ltd Endo

Tomoyuki Tokyo Ohka Kogyo Co Ltd Ando

Kotaro Tokyo Ohka Kogyo Coltd Endo

A computer-implemented method for generating user stories for a software product, includes collecting, by a processor, a plurality of requirements, creating, by the processor, a plurality of content space specification files that includes the plurality of requirements, processing, by the processor, the plurality of content space specification files to generate the user stories, defining, by the processor, a content space, and embedding, by the processor, the content space in the software product.

Embedding a software content space for run-time implementation

Embodiments of the present invention relate generally to non-self imagable and imagable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Norbornene-type polymers, compositions thereof and lithographic processes using such compositions

A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to faun a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.

Vinyl addition polycyclic olefin polymers prepared with non-olefinic chain transfer agents and uses thereof

A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to form a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.

Ni or Pd-catalyzed cationic polymerization of polycyclic olefins with silane chain transfer agents

Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Norbornene-type polymers, compositions thereof and lithographic process using such compositions

A method of controlling the molecular weight of poly(cyclic)olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

Use of a combination chain transfer and activating agent to control molecular weight and optical density of Pd catalyzed norbornene polymers

A photoresist composition encompassing a polymer having at least one polycyclic olefin repeat unit having a desired exo mole percent is provided, where the repeat unit is derived from a polycyclic olefin monomer having the desired exo mole percent. Such polymers having such repeat units having a desired exo mole percent offer control of differential dissolution rate and hence provide enhanced imaging properties. Exemplary monomers having a desired exo mole percent are also provided.

Method of controlling the differential dissolution rate of photoresist compositions, polycyclic olefin polymers and monomers used for making such polymers

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Poughkeepsie, NY, United States of America

Chun S Chang