Industrial Technology Research Institute

Chun-Lin Chiang

Hsin-Hung Lee

Jia-Huey Tsao

Cheng-Yu Lee

Kuo-Chi Chiu

Hsueh-Ching Shih

Chih-Cheng Feng

Kun-Chih Tsai

Win-Ti Lin

Chun-Min Su

An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.

Electron microscope having a carrier

An optical inspection apparatus capable of adjusting an incident angle of a detected light beam and adjusting a detecting angle for detecting the detected light beam. A driving mechanism is used to actuate two arms having a light source and a detector disposed thereon respectively to conduct a relative movement between the two arms so as to control the incident angle and the detecting angle. By means of the embodiments, mechanism for adjusting the angle is simplified so that the apparatus is capable of being adapted to combine with the application of micro sensors such that practicality of modularization design and microminiaturization and convenience of operation are capable of being greatly improved and that the cost can be reduced.

Optical inspection apparatus

Growing community of inventors

Taipei, Taiwan

Chun-Lin Chiang