Taiwan Semiconductor Manufacturing Comp. Ltd.

Institute of Nuclear Energy Research

Chun Liang Chen

Yichi Yen

Ming Shing

Kuo Lun Lo

Kuo-Ming Wu

Sheng-Chau Chen

Hau-Yi Hsiao

Shi Hwa Su

Wen Song Hwang

A height adjustable semiconductor wafer support is provided. The height adjustable semiconductor wafer support includes a chuck for supporting a semiconductor wafer, an adjustment mechanism having a top surface for supporting the chuck, and a stage coupled to the adjustment mechanism such that movement of the top surface of the adjustment mechanism relative to the stage changes a distance between the top surface of the adjustment mechanism and a top surface of the stage.

Height adjustable semiconductor wafer support

The present disclosure relates to a method and an associated process tool. The method includes generating electromagnetic radiation that is directed toward a perimeter of a pair of bonded workpieces and toward a radiation sensor that is arranged behind the perimeter of the pair of bonded workpieces. The electromagnetic radiation is scanned along a vertical axis. An intensity of the electromagnetic radiation that impinges on the radiation sensor is measured throughout the scanning. Measuring the intensity includes recording a plurality of intensity values of the electromagnetic radiation at a plurality of different positions along the vertical axis extending past top and bottom surfaces of the pair of bonded workpieces. A position of an interface between the pair of bonded workpieces is determined based on a maximum measured intensity value of the plurality of intensity values.

Process tool for analyzing bonded workpiece interface

A rotatable and replaceable plunger type multi-source radiator is provided for equipment correlation and radiation experiment. The rotatable and replaceable plunger type multi-source radiator comprising a radiation source rod, a rotatable radiation source selection device, staircases radiation aperture, radiation shields, and a mechanic operation arm for replacing radiation source. The plunger type rotatable and replaceable multi-source radiator of the present invention is capable of preventing radiation leakage and mutual interferences among radiation sources, providing precise positioning, safety operation, and simple replacement of radiation sources.

Rotatable and replaceable plunger type multi-source radiator

Growing community of inventors

Taoyuan, Taiwan

Chun Liang Chen