Taiwan Semiconductor Manufacturing Comp. Ltd.

Chun-Hung Chang

Tung-Lin Yang

Rouh Jier Wang

Some embodiments of the present disclosure provide a method of dissipating process exhaust from a chamber. The method includes conveying the process exhaust from the chamber through an inner tube of a pipeline to abatement. The process exhaust has a first temperature while exiting the chamber, and a second temperature while exiting the pipeline. The method maintains an outer tube of the pipeline at a vacuum state by a pump such that the inner tube is substantially thermal isolated from the atmosphere outside the pipeline. The second temperature is negative offset from the first temperature within a predetermined value.

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Hsinchu County, Taiwan

Chun-Hung Chang