Skhynix Inc.

Chun Ho Kang

Jong Bum Park

Young Seung Kim

A conductive layer may be fabricated on a semiconductor substrate by loading a silicon substrate in to a chamber whose inside temperature is at a loading temperature in the range of approximately 250&#xb0; C. to approximately 300&#xb0; C., increasing the inside temperature of the chamber from the loading temperature to a process temperature, and sequentially stacking a single crystalline silicon layer and a polycrystalline silicon layer over the silicon substrate by supplying a silicon source gas and an impurity source gas in to the chamber, where the chamber may be, for example, a CVD chamber or a LPCVD chamber.

Growing community of inventors

Icheon-si, South Korea

Chun Ho Kang