Taiwan Semiconductor Manufacturing Comp. Ltd.

Chun-Heng Liao

Harry-Hak-Lay Chuang

Hung Cho Wang

Jun-Yao Chen

Chang-Jen Hsieh

Felix Ying-Kit Tsui

Hau-Yan Lu

Chun-Yao Ko

Hsin-Li Cheng

Hung-Cho Wang

Jing-Hwang Yang

Liang-Kai Han

The present disclosure relates to a magneto-resistive random access memory (MRAM) cell having an extended upper electrode, and a method of formation. In some embodiments, the MRAM cell has a magnetic tunnel junction (MTJ) arranged over a conductive lower electrode. A conductive upper electrode is arranged over the magnetic tunnel junction. Below the conductive lower electrode is a first conductive via structure in a first dielectric layer. Below the conductive via structure is a discrete conductive jumper structure in a second dielectric layer. A dielectric body of a third dielectric material that is different from the first dielectric material and the second dielectric material extends vertical from the first dielectric layer at least partially into the second dielectric layer.

Magnetic tunnel junction structures and related methods

A memory cell with dual sidewall spacers and its manufacturing methods are provided. In some embodiments, the memory cell includes a bottom electrode disposed over a substrate, a resistance switching dielectric disposed over the bottom electrode and having a variable resistance, and a top electrode disposed over the resistance switching dielectric. The memory cell further includes a first sidewall spacer disposed on an upper surface of the bottom electrode and extending upwardly alongside the resistance switching dielectric and the top electrode. The memory cell further includes a second sidewall spacer having a bottom surface disposed on the upper surface of the bottom electrode and directly and conformally lining the first sidewall spacer.

Via landing enhancement for memory device

A method for manufacturing a memory device is provided. The method includes forming a bottom electrode layer, a resistance switching element layer over the bottom electrode layer, and a top electrode layer over the resistance switching element layer; patterning the top electrode layer into a top electrode; forming a protection spacer on a sidewall of the top electrode; patterning the resistance switching element layer into a resistance switching element after forming the protection spacer; and patterning the bottom electrode layer into a bottom electrode after patterning the resistance switching element layer.

Method for manufacturing memory device having protection spacer

A memory cell with dual sidewall spacers and its manufacturing methods are provided. In some embodiments, a multi-layer stack is formed and patterned to form a hard mask, a top electrode and a resistance switching dielectric. Then, a first dielectric spacer layer is formed over the bottom electrode layer, extending alongside the resistance switching dielectric, the top electrode, and the hard mask, and further extending over the hard mask. Then, a second dielectric spacer layer is formed directly on and conformally lining the first dielectric spacer layer. The first dielectric spacer layer is deposited at a first temperature and the second dielectric spacer layer is deposited at a second temperature higher than that of the first temperature.

The present disclosure relates an integrated circuit (IC). The IC comprises a memory region and a logic region. A lower metal layer is disposed over a substrate, and comprises a first lower metal line within the memory region. An upper metal layer overlies the lower metal layer, and comprises a first upper metal line within the memory region. A memory cell is disposed between the first lower metal line and the first upper metal line, and comprises a planar bottom electrode. The planar bottom electrode abuts a first lower metal via of the lower metal layer. By forming the planar bottom electrode and connecting the planar bottom electrode to the lower metal layer through the lower metal via, no additional BEVA planarization and/or patterning processes are needed. As a result, risk of damaging the lower metal lines are reduced, thereby providing more reliable read/write operations and/or better performance.

Embedded memory device between noncontigous interconnect metal layers

The present disclosure provides a semiconductor structure, including a logic region and a memory region adjacent to the logic region. The memory region includes a first Nmetal line of an Nmetal layer, a magnetic tunneling junction (MTJ) over first Nmetal line, and a first (N+1)metal via of an (N+1)metal layer, the first (N+1)metal via being disposed over the MTJ layer. N is an integer greater than or equal to 1. A method of manufacturing the semiconductor structure is also disclosed.

Semiconductor structure and method of forming the same

A memory device is disclosed. The memory device includes a substrate, including a substrate, including a source region and a drain region; and a gate stack, formed over a surface of the substrate, wherein the gate stack includes: a tunneling layer; a first layer; a second layer; a third layer; and a blocking layer; wherein each of the tunneling layer and the blocking layer has an oxygen proportion higher than the first, the second and the third layers; the first layer has a highest silicon proportion among the first, the second and the third layers; the second layer has a highest oxygen proportion among the first, the second and the third layers; and the first layer has a highest nitrogen proportion among the first, the second and the third layers. An associated gate stack and a manufacturing method are also disclosed.

Memory device, gate stack and method for manufacturing the same

The present disclosure involves a method. The method includes providing a substrate including a top surface. The method also includes forming a gate over the top surface of the substrate. The formed gate has a first height measured from the top surface of the substrate. The method also includes etching the gate to reduce the gate to a second height. This second height is substantially less than the first height. The present disclosure also involves a semiconductor device. The semiconductor device includes a substrate. The substrate includes a top surface. The semiconductor device also includes a first gate formed over the top surface of the substrate. The first gate has a first height. The semiconductor device also includes a second gate formed over the top surface of the substrate. The second gate has a second height. The first height is substantially less than the second height.

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Xindian, Taiwan

Chun-Heng Liao